The application works by loading the data in CSV format. The data should contains informations about the X and Y coordinates of each measurement.
The data can contains one or more measured parameters as long as each parameter is identified by a different name. Once the data is loaded the application will let the user choose the parameter to be plotted.
The CSV file with the data should be in a simple format with the headers in the first line and the measurements in the following lines like in the example below:
| thickness | RI | X | Y |
| 201.5 | 1.457 | 0 | 0 |
| 202.3 | 1.459 | 11.5 | 24.5 |
| 201.1 | 1.458 | 102.5 | -24.5 |
In addition the application will accept data coming from KLA-Tencor semiconductor ellipsometers and reflectometers.